Observation of Wet Samples Using a Novel Atmospheric Scanning Electron Microscope

نویسندگان

  • Yusuke Ominami
  • Shinsuke Kawanishi
  • Tatsuo Ushiki
  • Sukehiro Ito
چکیده

The scanning electron microscope (SEM) has been used as a powerful tool for providing surface information of micro and nanostructures. In recent years, SEM methods for observing wet samples under atmospheric pressure have been reported by some investigators [1-2]. With these methods, the sample space is separated by a thin transparent membrane from vacuum environment where electron beam is propagated, and samples attaching to the membrane are observed by SEM.

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تاریخ انتشار 2014